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Product detail

SERVOPRO DF-750 TDLAS Moisture Analyzer

SERVOPRO DF-750 ULTRA

The DF-750 ULTRA is the first choice in moisture analysis for the semiconductor industry

The DF-750 ULTRA is a trace/ultra-trace analyzer optimized to deliver industry-best moisture measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • High stability TDL trace/ultra-trace measurements
  • A no-compromise solution
  • High reliability

Specifications

    

  •    Gas Measured: Moisture
  •    Technology: TDLAS 
  •    Range:  0-20 ppm
  •    Accuracy: 3% of reading

   Range:  0-20 ppm

   Response time T90 < 3 minutes a 1l/min

  •    Flow: 0.5 to 2l/min 
  •    Pressure: 30-150 psi

   Output: 4- 20 mA

   Power: 110 / 220 VAC, 50Hz

  •    Ingress Protection: Indoor 

Key Applications

               Bulk gas quality control used in semiconductor fabs

               Leak detection checks for use UHP gases

 

See the link for detail specifcation.

https://www.servomex.com/gas-analyzers/finder/df-750-ultra/

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Servomex, Gestra, Rotork, Daniel, Georg Ficher, Agar, Sofis, NOV, Pump, Valves, Analyzer